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Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. The included CD contains a copy of the book which can be indexed using a Search function, and which can be enlarged on a monitor for a closer look at the diagrams. Sample homework and exam problems can also be found on the CD.

This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Customer Reviews (1)

Good for quick reading, Need Lieberman's book
I found this to be a good book for quick reading. However, you need Lieberman and Lichtenberg (L &L) for a detailed treatment. L & L is of course not a very pleasant reading, so this provides a good break to "keep moving" through the material. ... Read more

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Before matter as we know it emerged, the universe was filled with the primordial state of hadronic matter called quark gluon plasma. This hot soup of quarks and gluon is effectively an inescapable consequence of our current knowledge about the fundamental hadronic interactions, quantum chromodynamics. This book covers the ongoing search to verify this prediction experimentally and discusses the physical properties of this novel form of matter. ... Read more

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Fusion research started over half a century ago. Although the task remains unfinished, the end of the road could be in sight if society makes the right decisions. Nuclear Fusion: Half a Century of Magnetic Confinement Fusion Research is a careful, scholarly account of the course of fusion energy research over the past fifty years. The authors outline the different paths followed by fusion research from initial ignorance to present understanding. They explore why a particular scheme would not work and why it was more profitable to concentrate on the mainstream tokamak development. The book features descriptive sections, in-depth explanations of certain physical and technical issues, scientific terms, and an extensive glossary that explains relevant abbreviations and acronyms. ... Read more

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Emphasis is placed on the analysis of translational, rotational, vibrational and electronically excited state kinetics, coupled to the electron Boltzmann equation.

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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications.

This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development. ... Read more

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This comprehensive treatment of the physics of small-amplitude waves in hot magnetized plasmas provides an update of the author's "Theory of Plasma Waves". New topics covered include quasi-linear theory, inhomogenous plasmas, collisions, absolute and convective instability, and mode conversion. The book is aimed at graduate and advanced undergraduate students and researchers in plasmas, controlled fusion and space science. ... Read more

Customer Reviews (1)

Awesome
Spectacular book, not only for reference, but also as a learning text.Drastic improvement upon the 1960s first edition. ... Read more

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This combination of text and reference book describes the physical, plasma and chemical processes controlling the behavior of ionospheres, upper atmospheres and exospheres. It summarizes the structure, chemistry, dynamics and energetics of the terrestrial ionosphere and other solar system bodies, and discusses the processes, mechanisms and transport equations for solving fundamental research problems. This second edition incorporates new results, model developments and interpretations from the last 10 years. It includes the latest material on neutral atmospheres; the terrestrial ionosphere at low, middle and high latitudes; and planetary atmospheres and ionospheres, where results from recent space missions have yielded fresh data. Appendices outline physical constants, mathematical formulas, transport coefficients, and other important parameters for ionospheric calculations. This is an essential resource for researchers studying ionospheres, upper atmospheres, aeronomy and plasma physics. It is also an ideal textbook for graduate-level courses, with supplementary problem sets, and solutions for instructors at www.cambridge.org/9780521877060. ... Read more

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This unique book provides a fundamental introduction to all aspects of modern plasma chemistry. The book describes mechanisms and kinetics of chemical processes in plasma, plasma statistics, thermodynamics, fluid mechanics, and electrodynamics, as well as all major electric discharges applied in plasma chemistry. The book considers most of the major applications of plasma chemistry from electronics to thermal coatings, from treatment of polymers to fuel conversion and hydrogen production, and from plasma metallurgy to plasma medicine. The book can be helpful to engineers, scientists, and students interested in plasma physics, plasma chemistry, plasma engineering, and combustion, as well as in chemical physics, lasers, energy systems, and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics as well as a lot of convenient numerical formulas for practical calculations related to specific plasma-chemical processes and applications. The book contains a large number of problems and concept questions that are helpful in university courses related to plasma, lasers, combustion, chemical kinetics, statistics and thermodynamics, and high-temperature and high-energy fluid mechanics. ... Read more

Customer Reviews (2)

simply awesome
Unlike any technical effort I can recall this volume is both a "page turner" and an absolutely essential reference.Fridman has a fine skill at choosing the right details to collect on just about any topic you can pluck from the index or table of contents.His summary breadth is compelling and a real gold mine.His cited literature is well chosen.

Fridman- plasmachemistry
Item was delivered in time, but the book came with cover smashed at the edge.However, I don't know who's fault is it- seller or postal service. ... Read more

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This book provides an introduction and guide to modern advances in charged particle (and antiparticle) confinement by electromagnetic fields. Confinement in different trap geometries, the influence of trap imperfections, classical and quantum mechanical description of the trapped particle motion, different methods of ion cooling to low temperatures, and non-neutral plasma properties (including Coulomb crystals) are the main subjects. They form the basis of such applications of charged particle traps as high-resolution optical and microwave spectroscopy, mass spectrometry, atomic clocks, and, potentially, quantum computing. ... Read more

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Ionospheres provides a comprehensive description of the physical, plasma and chemical processes controlling the behavior of ionospheres. The relevant transport equations and related coefficients are derived in detail and their applicability and limitations are described. Relevant wave processes are outlined and important ion chemical processes and reaction rates are presented. The various energy deposition and transfer mechanisms are described in some detail, and a chapter is devoted to the various processes controlling the upper atmosphere and exosphere. The second half of the book presents our current understanding of the structure, chemistry, dynamics and energetics of the terrestrial ionosphere, and other solar system bodies. The final chapter describes ionospheric measurement techniques. The book will form a comprehensive and lasting reference for scientists interested in ionospheres, and it will also prove an ideal textbook for graduate students. It contains extensive student problem sets, and an answer book is available for instructors. ... Read more

Customer Reviews (1)

An invaluable textbook
For anyone who's at Postgrad or Postdoc level, this book is an invaluable addition to your library.Undergraduates may struggle with some of it, but I'm sure that any bright student could pick it up because it's written in clear, concise language.My only gripe is that the production quality of this paperback isn't what it should be for the money & I really wish I had bought the hardback version. ... Read more

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Introduction to Dusty Plasma Physics contains a detailed description of the occurrence of dusty plasmas in our Solar System, the Earth's mesosphere, and in laboratory discharges. The book illustrates numerous mechanisms for charging dust particles and provides studies of the grain dynamics under the influence of forces that are common in dusty plasma environments. ... Read more

Customer Reviews (2)

The Best Dusty Plasma Book
This is THE BEST dusty plasma book.I have had to use this in my research and this book encompasses every bit of this subject.It is very informative and tells a great deal.

Review of 'Introduction to Dusty Plasma Physics'
The book was written by authors who directly participated in the development of dusty plasma theory.It addresses current knowledge about dusty plasmas and summarizes more than 20 years of research in this rapidly evolving subject with its own wide range of topics . . . Overall, the book gives a comprehensive analysis of basic dusty plasma physics, combining in an original way laboratory and space plasma topics.There is no doubt that the book will find a well-deserved place on the shelves of all the plasma physicists and astrophysicists with an interest in space and laboratory dusty plasmas. ... Read more

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This book provides a comprehensive introduction to the theory of magnetic field line reconnection, now a major subject in plasma physics. Biskamp focuses on the various reconnection mechanisms dominating magnetic processes under the different plasma conditions encountered in astrophysical systems and in laboratory fusion devices. The book consists of two major parts: the first deals with the classical resistive approach, while the second presents an overview of weakly collisional or collisionless plasmas. Applications primarily concern astrophysical phenomena and dynamo theory, with emphasis on the solar and geodynamo, as well as magnetospheric substorms--the most spectacular reconnection events in the magnetospheric plasma. The theoretical procedures and results also apply directly to reconnection processes in laboratory plasmas, in particular the sawtooth phenomenon in tokamaks. The book will be of value to graduate students and researchers interested in magnetic processes both in astrophysical and laboratory plasma physics. ... Read more

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Here is a text on theoretical plasma physics, the science of extremely hot gases which make up most of the universe and are used extensively in fusion energy research. The authors treat a topic at the heart of this subject, transport theory, which predicts the electrical and thermal properties of the plasma. This comprehensive book is directed at graduate students in physics and professional research physicists, in particular, fusion energy scientists and space physicists. ... Read more

Customer Reviews (1)

A good book on an advanced topic
I am a fifth year graduate student studying astrophysical plasma physics (in particular, magnetic reconnection).For books of its type, "Collisional Transport in Magnetized Plasmas" has been surprisingly clear and full of lots of good information.The book is very well-organized.It is focused on laboratory plasmas (especially those of fusion interest), but the first few chapters are general enough to be of interest to astrophysical plasma physicists.If you can't find the Braginskii review article from the 60s in your library, this is a good substitute and contains most of the relevant information.If you do research in this area or need a reference on this topic, I highly recommend this book. ... Read more

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Photo acceleration has dominated the theoretical plasma physics area in recent years and has found application in all subjects where waves in continuous media are studied - plasma physics, astrophysics, and optics. This theory will provide a modern understanding of photon interaction with matter, helping to develop novel accelerators based on laser-plasma interactions, new radiation sources, and even new models for astrophysical objects.

Written by a major player in the field, this book describes the general theory of photo acceleration, which allows fluid, kinetic, quantum, and classical electrodynamical approaches to be formulated. It includes examples from plasma physics, cosmology, fiber optics, mathematical physics, particle accelerator physics, and radiation physics. ... Read more

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Although based on lectures given for graduate students and postgraduates starting in plasma physics, this concise introduction to the fundamental processes and tools is as well directed at established researchers who are newcomers to spectroscopy and seek quick access to the diagnostics of plasmas ranging from low- to high-density technical systems at low temperatures, as well as from low- to high-density hot plasmas. Basic ideas and fundamental concepts are introduced as well as typical instrumentation from the X-ray to the infrared spectral regions. Examples, techniques and methods illustrate the possibilities.

This book directly addresses the experimentalist who actually has to carry out the experiments and their interpretation. For that reason about half of the book is devoted to experimental problems, the instrumentation, components, detectors and calibration.

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This book is intended for physicists and chemists who need to understand the theory of atomic and molecular structure and processes, and who wish to apply the theory to practical problems. As far as practicable, the book provides a self-contained account of the theory of relativistic atomic and molecular structure, based on the accepted formalism of bound-state Quantum Electrodynamics. The author was elected a Fellow of the Royal Society of London in 1992.

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Atomic Spectra and Radiative Transitions covers the systematics of atomic spectra, continuous spectrum radiation, and the excitation of atoms. This second edition has additional chapters on relativistic corrections in the spectra of highly charged ions, which rounds off the previous treatment. Extensive tables of oscillator strengths (both dipole and quadrupole), probabilities and cross sections of radiative transitions complete this textbook, making it invaluable also as a reference work. ... Read more

Customer Reviews (1)

Atomic SpectraRadiative Transitions physics
Although is an litle old book, it is very good. Over all is a clear in its explanations. ... Read more